SOME PROPERTIES OF EVAPORATED AMORPHOUS SILICON MADE WITH ATOMIC-HYDROGEN

被引：20

作者：

MILLER, DL ^{[1
]}

LUTZ, H ^{[1
]}

WIESMANN, H ^{[1
]}

ROCK, E ^{[1
]}

GHOSH, AK ^{[1
]}

RAMAMOORTHY, S ^{[1
]}

STRONGIN, M ^{[1
]}

机构：

[1] BROOKHAVEN NATL LAB,UPTON,NY 11973

来源：

JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 12期

关键词：

D O I：

10.1063/1.324521

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6192 / 6193

页数：2

共 8 条

[1]

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[3] PREPARATION AND PROPERTIES OF AMORPHOUS SILICON [J].

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[4] DISSOCIATION ENERGY OF N-2 [J].

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[5]

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[6] EFFECTS OF HYDROGEN CONTAMINATION ON LOCALIZED STATES IN AMORPHOUS SILICON [J].

MALHOTRA, AK ;

NEUDECK, GW .

APPLIED PHYSICS LETTERS, 1976, 28 (01) :47-49

[7] MASS-SPECTROMETRIC ANALYSIS DURING VAPOR-DEPOSITION OF AMORPHOUS SILICON [J].

MELL, H ;

BRODSKY, MH .

THIN SOLID FILMS, 1977, 46 (03) :299-305

[8]

MILLER DL, 1978, B AM PHYS SOC, V23, P247

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