FLUORINE-SILICON REACTIONS AND THE ETCHING OF CRYSTALLINE SILICON

被引：96

作者：

VAN DE WALLE, CG

MCFEELY, FR

PANTELIDES, ST

机构：

来源：

PHYSICAL REVIEW LETTERS | 1988年 / 61卷 / 16期

关键词：

D O I：

10.1103/PhysRevLett.61.1867

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1867 / 1870

页数：4

共 21 条

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