TRANSFER OF F- IN THE REACTION OF SF6- WITH SOF4 - IMPLICATIONS FOR SOF4 PRODUCTION IN CORONA DISCHARGES

被引:24
作者
VANBRUNT, RJ
SIECK, LW
SAUERS, I
SIDDAGANGAPPA, MC
机构
[1] OAK RIDGE NATL LAB,OAK RIDGE,TN 37831
[2] INDIAN INST SCI,BANGALORE 560012,KARNATAKA,INDIA
关键词
D O I
10.1007/BF01016159
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
37
引用
收藏
页码:225 / 246
页数:22
相关论文
共 43 条
[1]   ELECTRON CAPTURE + IONIZATION PHENONEMENA IN SF6 + C7F14 [J].
ASUNDI, RK ;
CRAGGS, JD .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1964, 83 (5344) :611-&
[2]   NEGATIVE ION-MOLECULE REACTIONS OF SF4 [J].
BABCOCK, LM ;
STREIT, GE .
JOURNAL OF CHEMICAL PHYSICS, 1981, 75 (08) :3864-3870
[3]  
Becher W., 1970, Elektrotechnische Zeitschrift ETZ A, V91, P605
[4]  
Boudene C., 1974, Revue Generale de l'Electricite, P45
[5]   THE INTERACTION POTENTIALS OF SF6 IONS IN SF6 PARENT GAS DETERMINED FROM MOBILITY DATA [J].
BRAND, KP ;
JUNGBLUT, H .
JOURNAL OF CHEMICAL PHYSICS, 1983, 78 (04) :1999-2007
[6]   INORGANIC VOLATILE FLUORIDES OBTAINED FROM ELECTRICAL DECOMPOSITION OF SULFUR-HEXAFLUORIDE IN A QUARTZ TUBE [J].
BRUNO, G ;
CAPEZZUTO, P ;
CRAMAROSSA, F .
JOURNAL OF FLUORINE CHEMISTRY, 1979, 14 (02) :115-129
[9]   PLASMA-ETCHING OF SI AND SIO2 IN SF6-O2 MIXTURES [J].
DAGOSTINO, R ;
FLAMM, DL .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) :162-167
[10]   SYNTHESIS OF PENTAFLUOROSULPHUR CHLORIDE AND SULPHUR OXIDE TETRAFLUORIDE IN MICROWAVE DISCHARGE [J].
EMELEUS, HJ ;
TITTLE, B .
JOURNAL OF THE CHEMICAL SOCIETY, 1963, (MAR) :1644-&