PREPARATION OF THIN POLYMER-FILMS OF PREDICTABLE CHEMICAL FUNCTIONALITY USING PLASMA CHEMISTRY

被引：12

作者：

EVANS, JF

PROHASKA, GW

机构：

来源：

THIN SOLID FILMS | 1984年 / 118卷 / 02期

关键词：

D O I：

10.1016/0040-6090(84)90069-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：171 / 180

页数：10

共 19 条

[1] APPLICATION OF ESCA TO STUDIES OF STRUCTURE AND BONDING IN POLYMERS [J].

CLARK, DT ;

DILKS, A ;

PEELING, J ;

THOMAS, HR .

FARADAY DISCUSSIONS, 1975, 60 :183-195

[2] ESCA APPLIED POLYMERS .24. THEORETICAL INVESTIGATION OF MOLECULAR CORE BINDING AND RELAXATION ENERGIES IN A SERIES OF OXYGEN-CONTAINING ORGANIC-MOLECULES OF INTEREST IN THE STUDY OF SURFACE OXIDATION OF POLYMERS [J].

CLARK, DT ;

CROMARTY, BJ ;

DILKS, A .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1978, 16 (12) :3173-3184

[3]

CLARK DT, 1975, CHARACTERIZATION MET, V2, P5

[4] POLYMERIZATION OF AROMATIC SILANES IN RF PLASMAS [J].

HALLER, I .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (01) :180-183

[5] A MASS-SPECTROMETRIC INVESTIGATION OF THE PLASMA POLYMERIZATION OF METHYLTRIMETHOXYSILANE IN AN RF DISCHARGE [J].

HAYS, AK .

THIN SOLID FILMS, 1981, 84 (04) :401-407

[6] COMPARISONS OF GLOW-DISCHARGE POLYMERIZATIONS AMONG TETRAMETHYLSILANE, DIMETHYLDIMETHOXYSILANE, AND TETRAMETHOXYSILANE [J].

INAGAKI, N ;

KOYAMA, M .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1983, 21 (01) :183-190

[7] COMPARISONS OF GLOW-DISCHARGE POLYMERIZATION BETWEEN HEXAMETHYLDISILAZANE AND TRIMETHYLSILYLDIMETHYLAMINE [J].

INAGAKI, N ;

KISHI, A .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1983, 21 (08) :2335-2343

[8] GLOW-DISCHARGE POLYMERIZATION OF TETRAMETHYLSILANE INVESTIGATED BY INFRARED-SPECTROSCOPY AND ESCA [J].

INAGAKI, N ;

KISHI, A .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1983, 21 (06) :1847-1852

[9] GLOW-DISCHARGE POLYMERIZATION IN THE MIXTURE OF TETRAMETHYLSILANE AND AMMONIA GAS [J].

INAGAKI, N ;

NEJIGAKI, K ;

SUZUKI, K .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1983, 21 (11) :3181-3189

[10]

MCCRACKIN FL, NBS479 TECH NOT

← 1 2 →