A MASS-SPECTROMETRIC INVESTIGATION OF THE PLASMA POLYMERIZATION OF METHYLTRIMETHOXYSILANE IN AN RF DISCHARGE

被引：12

作者：

HAYS, AK

机构：

来源：

THIN SOLID FILMS | 1981年 / 84卷 / 04期

关键词：

D O I：

10.1016/0040-6090(81)90178-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：401 / 407

页数：7

共 9 条

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