MICROFABRICATION OF ARRAYS OF SCANNING ELECTRON-MICROSCOPES

被引：7

作者：

FEINERMAN, AD

CREWE, DA

CREWE, AV

机构：

[1] UNIV CHICAGO,ENRICO FERMI INST,CHICAGO,IL 60637

[2] UNIV CHICAGO,DEPT PHYS,CHICAGO,IL 60637

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587496

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3182 / 3186

页数：5

共 20 条

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[6]

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[7] SUB-CENTIMETER MICROMACHINED ELECTRON-MICROSCOPE [J].

FEINERMAN, AD ;

CREWE, DA ;

PERNG, DC ;

SHOAF, SE ;

CREWE, AV .

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[8]

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[9]

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[10]

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