ORGANOMETALLIC VAPOR-PHASE EPITAXY OF GALLIUMARSENIDE USING GA(CH3)3N(CH3)3-ADDUCT AS PRECURSOR

被引:6
作者
SEIFERT, W
PLOSKA, K
SCHWETLICK, S
BUTTER, E
机构
关键词
D O I
10.1002/crat.2170240106
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:29 / 33
页数:5
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