INFRARED-SPECTROSCOPY OF INTERFACES IN AMORPHOUS HYDROGENATED SILICON SILICON-NITRIDE SUPERLATTICES

被引:39
作者
ABELES, B [1 ]
YANG, L [1 ]
PERSANS, PD [1 ]
STASIEWSKI, HS [1 ]
LANFORD, W [1 ]
机构
[1] SUNY ALBANY,ALBANY,NY 12222
关键词
D O I
10.1063/1.96932
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:168 / 170
页数:3
相关论文
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