TEMPERATURE PROCESSING EFFECTS IN PROTON-IMPLANTED N-TYPE GAAS

被引:9
作者
MENTZER, MA
HUNSPERGER, RG
ZAVADA, JM
JENKINSON, HA
GAVANIS, TJ
机构
[1] UNIV DELAWARE,DEPT ELECT ENGN,NEWARK,DE 19711
[2] USA,AMC COMMAND FSL,DOVER,NJ 07801
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1983年 / 32卷 / 01期
关键词
D O I
10.1007/BF00626129
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:19 / 25
页数:7
相关论文
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