ATOMIC LAYER EPITAXY OF THE GA-AS-IN-AS SUPERALLOY

被引:35
作者
MCDERMOTT, BT [1 ]
ELMASRY, NA [1 ]
TISCHLER, MA [1 ]
BEDAIR, SM [1 ]
机构
[1] N CAROLINA STATE UNIV,DEPT ELECT & COMP ENGN,RALEIGH,NC 27695
关键词
D O I
10.1063/1.98484
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1830 / 1832
页数:3
相关论文
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