ATOMIC LAYER EPITAXY

被引:219
作者
GOODMAN, CHL [1 ]
PESSA, MV [1 ]
机构
[1] TAMPERE UNIV TECHNOL,DEPT PHYS,SF-33101 TAMPERE 10,FINLAND
关键词
D O I
10.1063/1.337344
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:R65 / R81
页数:17
相关论文
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