PLANAR DOPING BY INTERRUPTED MOVPE GROWTH OF GAAS

被引:17
作者
OHNO, H
IKEDA, E
HASEGAWA, H
机构
关键词
D O I
10.1016/0022-0248(84)90390-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:15 / 20
页数:6
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