PRODUCTION AND CHARACTERIZATION OF SMOOTH, HYDROGEN-TERMINATED DIAMOND C(100)

被引:117
作者
THOMS, BD [1 ]
OWENS, MS [1 ]
BUTLER, JE [1 ]
SPIRO, C [1 ]
机构
[1] GE CO,CORP RES & DEV,SCHENECTADY,NY 12301
关键词
D O I
10.1063/1.112503
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the production of smooth and well-ordered C(100) surfaces by exposure to a pure hydrogen plasma. A two domain 2×1 surface reconstruction is observed by low energy electron diffraction with half-order spots visible using incident electrons with energies as low as 13 eV. High-resolution electron energy loss spectroscopy reveals a large enhancement in specular reflectivity of low energy electrons following plasma treatment. The hydrogenated surface is stable in air and free of adsorbed hydrocarbons upon insertion into ultrahigh vacuum. © 1994 American Institute of Physics.
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页码:2957 / 2959
页数:3
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