DETECTION AND APPLICATION OF ACOUSTIC-EMISSION IN LASER-ENHANCED CHEMICAL ETCHING

被引：1

作者：

SHIOSAKI, T ^{[1
]}

MASUDA, H ^{[1
]}

ADACHI, M ^{[1
]}

KAWABATA, A ^{[1
]}

机构：

[1] KYOTO UNIV,FAC ENGN,DEPT ELECTR,SAKYO KU,KYOTO 606,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷

关键词：

D O I：

10.7567/JJAPS.26S1.230

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：230 / 232

页数：3

共 6 条

[1]

CHUNG TJ, 1982, IBM J RES DEV, V26, P145

[2] INVESTIGATION OF LASER-ENHANCED ELECTROPLATING MECHANISMS [J].

PUIPPE, JC ;

ACOSTA, RE ;

VONGUTFELD, RJ .

[3]

Shiosaki T., 1983, Japanese Journal of Applied Physics, Supplement, V22, P109

[4] LASER ENHANCED ETCHING IN KOH [J].

VONGUTFELD, RJ ;

HODGSON, RT .

[5] LASER-ENHANCED PLATING AND ETCHING - MECHANISMS AND APPLICATIONS [J].

VONGUTFELD, RJ ;

ACOSTA, RE ;

ROMANKIW, LT .

[6]

YEAK CE, 1982, 1982 P IEEE ULTR S N, P555