共 20 条
[2]
GOEDHEER W, 1990, 10TH P EUR SECT C AT, P80
[6]
ENERGY-RESOLVED ANGULAR-DISTRIBUTIONS OF O+ IONS AT THE RADIO-FREQUENCY-POWERED ELECTRODE IN REACTIVE ION ETCHING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1992, 10 (05)
:3086-3091
[7]
KOHLER K, 1985, J APPL PHYS, V57, P59, DOI 10.1063/1.335396
[8]
KOHLER K, 1985, J APPL PHYS, V58, P3350, DOI 10.1063/1.335797