ION TRANSIT THROUGH CAPACITIVELY COUPLED AR SHEATHS - ION CURRENT AND ENERGY-DISTRIBUTION

被引：51

作者：

GREENE, WM ^{[1
]}

HARTNEY, MA ^{[1
]}

OLDHAM, WG ^{[1
]}

HESS, DW ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 05期

关键词：

D O I：

10.1063/1.339965

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1367 / 1371

页数：5

共 19 条

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