MASS-SPECTROMETRIC AND ION ENERGY DIAGNOSTICS IN THE STUDY OF PLASMA-ETCHING AND POLYMERIZATION

被引：16

作者：

FERREIRO, LM ^{[1
]}

ERNIE, DW ^{[1
]}

EVANS, JF ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ENGN,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574435

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2280 / 2284

页数：5

共 19 条

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[10]

FERREIRO LM, IN PRESS

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