PHOTO CHEMICAL VAPOR-DEPOSITION OF METAL-OXIDE FILMS RELATING TO BI-SR-CA-CU-O SUPERCONDUCTOR

被引:5
作者
KOINUMA, H
CHAUDHARY, KA
NAKABAYASHI, M
SHIRAISHI, T
HASHIMOTO, T
KITAZAWA, K
SUEMUNE, Y
YAMAMOTO, T
机构
[1] TOKAI UNIV,FAC ENGN,DEPT COMMUN,HIRATSUKA,KANAGAWA 25912,JAPAN
[2] UNIV TOKYO,FAC ENGN,DEPT IND CHEM,BUNKYO KU,TOKYO 113,JAPAN
[3] NIHON KAGAKU SANGYO CO LTD,SOKA 340,JAPAN
[4] TOKYO INST TECHNOL,RESOURCES UTILIZAT RES LAB,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 04期
关键词
HIGH-TC SUPERCONDUCTOR; BI-SR-CA-CU-O SYSTEM; PHOTO CVD; OXIDE FILM; LOW TEMPERATURE GROWTH; CA-CU-O;
D O I
10.1143/JJAP.30.656
中图分类号
O59 [应用物理学];
学科分类号
摘要
Oxide films relating to high-T(c) superconducting Bi-Sr-Ca-Cu-O system were prepared by an oxidative photochemical vapor deposition using a low pressure mercury lamp. Bismuth oxide film was prepared by the photo decomposition of Bi(C6H5)3 in the presence of oxygen (20 Torr) at 300-degrees-C, while no film was obtained without the UV light irradiation. The UV light irradiation increased X-ray diffraction peak intensities of CuO, CaCO3, and SrCO3 films prepared from Cu(dipyvaloylmethanate: DPM)2, Ca(DPM)2, and Sr(DPM)2, respectively, at a temperatures of 400-degrees-C. By simultaneous supply of Ca(DPM)2 and Cu(DPM)2, Ca2CuO3 crystalline film without CaCO3 contamination was formed at 400-degrees-C. Without the UV irradiation, amorphous Ca-Cu-O film was obtained by thermal CVD. Photochemical reactions using N2O and NO2 instead of O2 were also examined.
引用
收藏
页码:656 / 660
页数:5
相关论文
共 10 条
[1]   FORMATION OF HIGH-TC SUPERCONDUCTING FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION [J].
BERRY, AD ;
GASKILL, DK ;
HOLM, RT ;
CUKAUSKAS, EJ ;
KAPLAN, R ;
HENRY, RL .
APPLIED PHYSICS LETTERS, 1988, 52 (20) :1743-1745
[2]   MICROWAVE PLASMA CVD OF OXIDE-FILMS RELATING TO HIGH-TC BI-SR-CA-CU-O SUPERCONDUCTOR [J].
HASHIMOTO, T ;
KOSAKA, T ;
YOSHIDA, Y ;
KOINUMA, H .
MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 1990, 184 :207-211
[3]   DEPOSITION OF BI, SR, CA, AND CU OXIDE-FILMS BY RF GLOW-DISCHARGE GENERATED AT RELATIVELY HIGH-PRESSURE [J].
HASHIMOTO, T ;
FUKUDA, K ;
KOGOMA, M ;
OKAZAKI, S ;
YOSHIMOTO, M ;
KOINUMA, H .
MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 1990, 184 :201-205
[4]   PURIFICATION AND UV-VIS LIGHT-ABSORPTION PROPERTY OF SOURCE MATERIALS FOR CVD OF HIGH-TC SUPERCONDUCTING FILMS [J].
HASHIMOTO, T ;
KITAZAWA, K ;
SUEMUNE, Y ;
YAMAMOTO, T ;
KOINUMA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (12) :L2215-L2218
[5]  
Ihara H., 1989, Advances in Superconductivity. Proceedings of the 1st International Symposium on Superconductivity, P793
[6]  
KANEHORI K, 1989, 1989 P MRS FALL M
[7]  
KOINUMA H, 1990, 4TH P ANN C SUP APPL
[8]  
KOINUMA H, 1990, CERAM JPN, V25, P1142
[9]   PREPARATION OF YBA2CU3O7-X FILMS BY CHEMICAL VAPOR-DEPOSITION [J].
YAMANE, H ;
KUROSAWA, H ;
HIRAI, T .
CHEMISTRY LETTERS, 1988, (06) :939-940
[10]   LOW-TEMPERATURE INSITU FORMATION OF Y-BA-CU-O HIGH-TC SUPERCONDUCTING THIN-FILMS BY PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
ZHAO, J ;
NOH, DW ;
CHERN, C ;
LI, YQ ;
NORRIS, P ;
GALLOIS, B ;
KEAR, B .
APPLIED PHYSICS LETTERS, 1990, 56 (23) :2342-2344