IN-SITU INVESTIGATION OF ZNS DEPOSITION ON MICA BY SUCCESSIVE IONIC LAYER ADSORPTION AND REACTION METHOD AS STUDIED WITH ATOMIC-FORCE MICROSCOPY

被引:13
作者
RESCH, R
PROHASKA, T
FRIEDBACHER, G
GRASSERBAUER, M
KANNIAINEN, T
LINDROOS, S
LESKELA, M
NIINISTO, L
BROEKAERT, JAC
机构
[1] VIENNA UNIV TECHNOL,INST ANALYT CHEM,A-1060 VIENNA,AUSTRIA
[2] HELSINKI UNIV,DEPT CHEM,SF-00014 HELSINKI,FINLAND
[3] HELSINKI UNIV TECHNOL,INORGAN & ANALYT CHEM LAB,SF-02150 ESPOO,FINLAND
[4] UNIV DORTMUND,DEPT CHEM,D-44221 DORTMUND,GERMANY
来源
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1995年 / 353卷 / 5-8期
关键词
D O I
10.1007/BF00321369
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The growth of ZnS thin films on a mica substrate in a Successive Ionic Layer Adsorption and Reaction (SILAR) process has been studied. The films were deposited in-situ using the commercial AFM liquid cell as flow-through reactor. Reactants and rinsing water were exchanged in the cell continuously by a computer controlled valve system. In this way the film growth could be observed directly in a time resolved sequence of images taken after 1 up to 100 cycles. The results show that the stability of the films increases between 1 and 30 cycles and that a full coverage of the surface is reached after approximately 50 cycles.
引用
收藏
页码:772 / 777
页数:6
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