ION-ENERGY DISTRIBUTIONS IN LIQUID-METAL-ION SOURCES

被引:8
作者
ISHITANI, T
KAWANAMI, Y
OHNISHI, T
UMEMURA, K
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1987年 / 44卷 / 03期
关键词
D O I
10.1007/BF00616695
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:233 / 238
页数:6
相关论文
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