ION-ENERGY DISTRIBUTIONS IN LIQUID-METAL-ION SOURCES

被引：8

作者：

ISHITANI, T

KAWANAMI, Y

OHNISHI, T

UMEMURA, K

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1987年 / 44卷 / 03期

关键词：

D O I：

10.1007/BF00616695

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：233 / 238

页数：6

共 22 条

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[20] BORON AND PHOSPHORUS ION EMISSIONS FROM A CU-P-PT-B LIQUID-METAL ION-SOURCE [J].

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