MASS AND ENERGY ANALYSES OF GALLIUM-INDIUM LIQUID-METAL-ION SOURCES

被引：12

作者：

ISHITANI, T

UMEMURA, K

TAMURA, H

机构：

[1] Hitachi Ltd, Central Research Lab,, Tokyo, Jpn, Hitachi Ltd, Central Research Lab, Tokyo, Jpn

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 06期

关键词：

D O I：

10.1143/JJAP.24.L451

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L451 / L454

页数：4

共 23 条

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[2]

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[9] DEVELOPMENT OF PHOSPHORUS LIQUID-METAL-ION SOURCE [J].

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[10] SCANNING MICROBEAM USING A LIQUID-METAL ION-SOURCE [J].

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