GAS-PHASE COMBINATION REACTIONS OF SF4 AND SF5 WITH F IN PLASMAS OF SF6

被引：32

作者：

RYAN, KR

PLUMB, IC

机构：

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1988年 / 8卷 / 03期

关键词：

D O I：

10.1007/BF01020407

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：281 / 291

页数：11

共 25 条

[1] A KINETIC-MODEL FOR PLASMA-ETCHING SILICON IN A SF6/O2 RF DISCHARGE [J].

ANDERSON, HM ;

MERSON, JA ;

LIGHT, RW .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) :156-164

[2] THE KINETICS AND MECHANISM OF THE PHOTOCHEMICAL-REACTION BETWEEN SF4 AND FLUORINE AT 365-NM [J].

ARAMENDIA, PF ;

SCHUMACHER, HJ .

JOURNAL OF PHOTOCHEMISTRY, 1985, 28 (04) :491-502

[3] MOLECULAR-MODELS FOR RECOMBINATION AND DISPROPORTIONATION OF RADICALS [J].

BENSON, SW .

CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1983, 61 (05) :881-887

[4] PLASMA-ETCHING OF SI AND SIO2 IN SF6-O2 MIXTURES [J].

DAGOSTINO, R ;

FLAMM, DL .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) :162-167

[5] THEORY OF THERMAL UNIMOLECULAR REACTIONS IN THE FALL-OFF RANGE .2. WEAK COLLISION RATE CONSTANTS [J].

GILBERT, RG ;

LUTHER, K ;

TROE, J .

BERICHTE DER BUNSEN-GESELLSCHAFT-PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 1983, 87 (02) :169-177

[6]

GILBERT RG, 1983, QUANTUM CHEM PROGRAM, V3, P64

[7] THE KINETICS OF THE THERMAL-REACTION BETWEEN SULFUR-TETRAFLUORIDE AND FLUORINE IN THE PRESENCE OF OXYGEN [J].

GONZALEZ, AC ;

SCHUMACHER, HJ .

ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-WIESBADEN, 1981, 127 (02) :167-177

[8] THE KINETICS AND THE MECHANISM OF THE THERMAL-REACTION BETWEEN SULFURTETRAFLUORIDE AND FLUORINE [J].

GONZALEZ, AC ;

SCHUMACHER, HJ .

ZEITSCHRIFT FUR NATURFORSCHUNG SECTION B-A JOURNAL OF CHEMICAL SCIENCES, 1981, 36 (11) :1381-1385

[9] A CRITICAL-REVIEW OF THE CHEMICAL-KINETICS OF SF4, SF5, AND S2F10 IN THE GAS-PHASE [J].

HERRON, JT .

INTERNATIONAL JOURNAL OF CHEMICAL KINETICS, 1987, 19 (02) :129-142

[10] ELECTRON AND CHEMICAL-KINETICS IN THE LOW-PRESSURE RF DISCHARGE ETCHING OF SILICON IN SF6 [J].

KLINE, LE .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) :145-155

← 1 2 3 →