FLUCTUATION-FREE ELECTRON-EMISSION FROM NON-FORMED METAL-INSULATOR-METAL (MIM) CATHODES FABRICATED BY LOW CURRENT ANODIC-OXIDATION

被引:42
作者
KUSUNOKI, T
SUZUKI, M
SASAKI, S
YAGUCHI, T
AIDA, T
机构
[1] Central Research Laboratory, Hitachi Ltd, Kokubunji,Tokyo
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1993年 / 32卷 / 11B期
关键词
METAL-INSULATOR-METAL; CATHODE; ANODIC OXIDATION; LOW ELECTROLYSIS CURRENT; FORMED; NON-FORMED; TRANSFER RATIO; ELECTRON EMISSION THRESHOLD; FLUCTUATION-FREE;
D O I
10.1143/JJAP.32.L1695
中图分类号
O59 [应用物理学];
学科分类号
摘要
Fluctuation-free electron emission is obtained from MIM (Al-Al2O3-Au) cathodes. The Al2O3 layer is fabricated by anodic oxidation with a reduced electrolysis current density, i.e., a reduced oxidation rate. The slow oxidation process improves the insulating effect of the Al2O3 layer, and enables the MIM cathodes to operate in the non-formed state. The fluctuation-free emission is reproducible when the diode voltage is cut off instantaneously. With a thin Al2O3 layer, the diode voltage reguired for the cathode operation is reduced to values slightly above the work function of the top electrode.
引用
收藏
页码:L1695 / L1697
页数:3
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