MASS-SEPARATED ION-BEAM DEPOSITION OF DIAMOND-LIKE THIN-FILMS

被引：10

作者：

HUCK, H

JECH, A

HALAC, EB

NICOLAI, J

DEBENYACAR, MAR

RIGHINI, R

机构：

[1] COMIS NACL ENERGIA ATOM,DEPT FIS,AVE LIBERTADOR 8250,RA-1429 BUENOS AIRES,DF,ARGENTINA

[2] UNIV NACL LUJAN,DEPT CIENCIAS BASICAS,RA-6700 LUJAN,BUENOS AIRES,ARGENTINA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 84卷 / 01期

关键词：

D O I：

10.1016/0168-583X(94)95704-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Deposition of diamond-like thin films has been achieved using mass-separated C+, CH3+ and CH4+ ion beams of energies between 1 and 40 keV. Characterization using different methods shows that the structure and physical properties of the films obtained are closer to those of diamond when 30-40 keV CH3+ or CH4+ ion beams are used. The hydrogen concentration, measured with elastic recoil detection analysis, is lower than 1 at.% for all the 30 keV hydrocarbon beams used.

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收藏

页码：62 / 66

页数：5

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