RESIDUAL-STRESS IN PHYSICALLY VAPOR-DEPOSITED FILMS - A STUDY OF DEVIATIONS FROM ELASTIC BEHAVIOR

被引：46

作者：

PERRY, AJ

JAGNER, M

机构：

来源：

THIN SOLID FILMS | 1989年 / 171卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90044-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：197 / 216

页数：20

相关论文

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