METALLORGANIC CHEMICAL VAPOR-DEPOSITION - A NEW ERA IN OPTICAL COATING TECHNOLOGY

The viability of metallorganic chemical vapor deposition process for depositing high quality optical filters at relatively low cost was demonstrated. MOCVD fabricated, refractive oxide filters consisting essentially of alternating layers of Ta2O5 and SiO2 Were found to be suitable for use at high temperatures (> 800-degrees-C) and long operational times (around 3000 h). These films exhibit relatively low stress and low light scattering, are strongly adherent to substrates, and exhibit good optical characteristics. Various technical challenges including stress and absorption minimization, and low cost processing are discussed in detail.