ATOMIC LAYER EPITAXY OF GAINP ORDERED ALLOY

被引:62
作者
MCDERMOTT, BT
REID, KG
ELMASRY, NA
BEDAIR, SM
DUNCAN, WM
YIN, X
POLLAK, FH
机构
[1] TEXAS INSTRUMENTS INC, DALLAS, TX 75265 USA
[2] CUNY BROOKLYN COLL, DEPT PHYS, BROOKLYN, NY 11210 USA
关键词
D O I
10.1063/1.102553
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the successful growth of ordered GaInP by atomic layer epitaxy on a GaAs substrate. The growth was achieved by alternate exposures to TEI, PH3, TMGa, and PH3 fluxes, and epilayers were found to closely match the GaAs substrate irrespective of the growth conditions. Room-temperature photoreflectance results indicate a band gap of 1.78 eV, the lowest value yet reported for such ordered alloys. Photoluminescence shows an anomalous temperature dependence behavior and transmission electron microscopy studies indicate that ordering takes place preferentially on (111) alternating planes.
引用
收藏
页码:1172 / 1174
页数:3
相关论文
共 19 条
  • [1] Aspnes D. E., 1980, Handbook on semiconductors, vol.II. Optical properties of solids, P109
  • [2] ATOMIC LAYER EPITAXY OF III-V BINARY COMPOUNDS
    BEDAIR, SM
    TISCHLER, MA
    KATSUYAMA, T
    ELMASRY, NA
    [J]. APPLIED PHYSICS LETTERS, 1985, 47 (01) : 51 - 53
  • [3] RECENT PROGRESS IN ATOMIC LAYER EPITAXY OF III-V COMPOUNDS
    BEDAIR, SM
    MCDERMOTT, BT
    IDE, Y
    KARAM, NH
    HASHEMI, H
    TISCHLER, MA
    TIMMONS, M
    TARN, JCL
    ELMASRY, N
    [J]. JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) : 182 - 189
  • [4] CHAN YJ, 1988, GAAS RELATED COMPOUN, P459
  • [5] GAAS/ALGAAS QUANTUM-WELL LASERS WITH ACTIVE REGIONS GROWN BY ATOMIC LAYER EPITAXY
    DENBAARS, SP
    BEYLER, CA
    HARIZ, A
    DAPKUS, PD
    [J]. APPLIED PHYSICS LETTERS, 1987, 51 (19) : 1530 - 1532
  • [6] STUDIES OF GAXIN1-XP LAYERS GROWN BY METALORGANIC VAPOR-PHASE EPITAXY - EFFECTS OF V/III RATIO AND GROWTH TEMPERATURE
    GOMYO, A
    KOBAYASHI, K
    KAWATA, S
    HINO, I
    SUZUKI, T
    YUASA, T
    [J]. JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 367 - 373
  • [7] HIGH-QUALITY QUANTUM WELLS OF INGAP GAAS GROWN BY MOLECULAR-BEAM EPITAXY
    HAFICH, MJ
    QUIGLEY, JH
    OWENS, RE
    ROBINSON, GY
    LI, D
    OTSUKA, N
    [J]. APPLIED PHYSICS LETTERS, 1989, 54 (26) : 2686 - 2688
  • [8] ATOMIC LAYER EPITAXY OF PLANAR-DOPED STRUCTURES FOR NONALLOYED CONTACTS AND FIELD-EFFECT TRANSISTOR
    HASHEMI, M
    RAMDANI, J
    MCDERMOTT, BT
    REID, K
    BEDAIR, SM
    [J]. APPLIED PHYSICS LETTERS, 1990, 56 (10) : 964 - 966
  • [9] SIDEWALL GROWTH BY ATOMIC LAYER EPITAXY
    IDE, Y
    MCDERMOTT, BT
    HASHEMI, M
    BEDAIR, SM
    GOODHUE, WD
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (23) : 2314 - 2316
  • [10] ANOMALOUS TEMPERATURE-DEPENDENCE OF THE ORDERED GA0.5IN0.5P PHOTOLUMINESCENCE SPECTRUM
    KONDOW, M
    MINAGAWA, S
    INOUE, Y
    NISHINO, T
    HAMAKAWA, Y
    [J]. APPLIED PHYSICS LETTERS, 1989, 54 (18) : 1760 - 1762