ON THE INFLUENCE OF CRATER GEOMETRY ON DEPTH RESOLUTION OF AES AND XPS PROFILES OF TANTALUM OXIDE-FILMS

被引：38

作者：

MATHIEU, HJ

LANDOLT, D

机构：

来源：

关键词：

D O I：

10.1002/sia.740050205

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：77 / 82

页数：6

共 19 条

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ANDERSEN, HH
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[3] HOFMANN S, 1981, ANALUSIS, V9, P181
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[5] DEPTH RESOLUTION FACTOR OF A STATIC GAUSSIAN ION-BEAM
MALHERBE, JB
SANZ, JM
HOFMANN, S
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[6] INFLUENCE OF ION-BOMBARDMENT ON DEPTH RESOLUTION IN AUGER-ELECTRON SPECTROSCOPY ANALYSIS OF THIN GOLD-FILMS ON NICKEL
MATHIEU, HJ
MCCLURE, DE
LANDOLT, D
[J]. THIN SOLID FILMS, 1976, 38 (03) : 281 - 294
[7] MATHIEU HJ, 1978, J MICROSC SPECT ELEC, V3, P113
[8] MATHIEU HJ, 1977, 7TH P INT VAC C 3RD, P2023
[9] MATHIEU HJ, 1979, MAR P SPECTR AUG LES
[10] COMBINED ESCA AND AUGER SPECTROMETER
PALMBERG, PW
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 379 - 384