SURFACE PREPARATION FOR QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY - MECHANICAL POLISHING AND INERT-GAS ION SPUTTERING

被引:6
作者
BURKE, MA
SCHREURS, JJ
机构
关键词
D O I
10.1002/sia.740050406
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:155 / 160
页数:6
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