THE (0001)-SURFACE OF 6H-SIC - MORPHOLOGY, COMPOSITION AND STRUCTURE

被引：112

作者：

STARKE, U

BRAM, C

STEINER, PR

HARTNER, W

HAMMER, L

HEINZ, K

MULLER, K

机构：

[1] Universität Erlangen-Nürnberg, D-91058 Erlangen

来源：

APPLIED SURFACE SCIENCE | 1995年 / 89卷 / 02期

关键词：

D O I：

10.1016/0169-4332(95)00024-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The morphology, composition and structure of wet chemically prepared 6H-SiC(0001) samples were investigated immediately after introduction into vacuum. Scanning tunneling microscopy displayed large atomically flat areas on the surface. The step structure found is correlated to the sample periodicity normal to the surface. Most step heights are multiples of half the vertical unit cell length. Low-energy electron diffraction (LEED) revealed good surface order with bulk-like lateral periodicity. From high-resolution electron energy loss spectroscopy the saturation of dangling bonds with hydroxyl species could be determined. This termination is responsible for an electron beam sensitivity found in LEED. Upon annealing the oxygen is removed and carbon-carbon bonds develop on the surface as demonstrated by Auger electron spectroscopy. This new structure is ordered in a (root 3 X root 3)R30 degrees periodicity.

引用

页码：175 / 185

页数：11

共 40 条

[11] THE BETA-SIC(100) SURFACE STUDIED BY LOW-ENERGY ELECTRON-DIFFRACTION, AUGER-ELECTRON SPECTROSCOPY, AND ELECTRON-ENERGY LOSS SPECTRA [J].

DAYAN, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (01) :38-45

[12]

FUCHS R, 1965, PHYS REV, V140, P2076

[13]

HEUELL P, 1994, UNPUB P INT C SILICO

[14] SILICON-CARBIDE BLUE-LIGHT EMITTING DIODES WITH IMPROVED EXTERNAL QUANTUM EFFICIENCY [J].

HOFFMANN, L ;

ZIEGLER, G ;

THEIS, D ;

WEYRICH, C .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) :6962-6967

[15] DISSOCIATIVE CHEMISORPTION OF H2O ON SI(100) AND SI(111) - A VIBRATIONAL STUDY [J].

IBACH, H ;

WAGNER, H ;

BRUCHMANN, D .

SOLID STATE COMMUNICATIONS, 1982, 42 (06) :457-459

[16]

Ibach H., 1982, ELECTRON ENERGY LOSS

[17] QUANTITATIVE SURFACE-ANALYSIS (AES) OF SIC [J].

JORGENSEN, B ;

MORGEN, P .

SURFACE AND INTERFACE ANALYSIS, 1990, 16 (1-12) :199-202

[18] SURFACE-COMPOSITION OF SIC AFTER ION-BOMBARDMENT, ANNEALING, AND EXPOSURE TO OXYGEN [J].

JORGENSEN, B ;

MORGEN, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1701-1704

[19] SURFACE-STRUCTURE AND COMPOSITION OF BETA-SIC AND 6H-SIC [J].

KAPLAN, R .

SURFACE SCIENCE, 1989, 215 (1-2) :111-134

[20] SURFACE-STRUCTURES OF BETA-SIC AND PSEUDOMORPHIC SI ADLAYERS [J].

KAPLAN, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :829-830

← 1 2 3 4 →