SURFACE-COMPOSITION OF SIC AFTER ION-BOMBARDMENT, ANNEALING, AND EXPOSURE TO OXYGEN

被引：27

作者：

JORGENSEN, B ^{[1
]}

MORGEN, P ^{[1
]}

机构：

[1] ODENSE UNIV,INST FYS,CAMPUSVEJ 55,DK-5230 ODENSE M,DENMARK

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573959

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：1701 / 1704

页数：4

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