STUDIES OF SIC FORMATION ON SI (100) BY CHEMICAL VAPOR-DEPOSITION

被引：106

作者：

BOZSO, F ^{[1
]}

YATES, JT ^{[1
]}

CHOYKE, WJ ^{[1
]}

MUEHLHOFF, L ^{[1
]}

机构：

[1] UNIV PITTSBURGH,DEPT PHYS,PITTSBURGH,PA 15260

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 08期

关键词：

D O I：

10.1063/1.335420

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2771 / 2778

页数：8

共 35 条

[1] BUFFER-LAYER TECHNIQUE FOR THE GROWTH OF SINGLE-CRYSTAL SIC ON SI
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SPRAGUE, JA
[J]. APPLIED PHYSICS LETTERS, 1984, 44 (05) : 525 - 527
[2] AUGER AND X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF SODIUM METAL AND SODIUM OXIDE
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STREET, FJ
[J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1975, 7 (01) : 1 - 31
[3] MEAN FREE-PATH OF PHOTO-ELECTRONS IN SILICON AND SILICON-OXIDES
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HUBNER, K
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1981, 67 (02): : 517 - 526
[4] ELECTRON-SPECTROSCOPY STUDY OF SIC
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CHOYKE, WJ
YATES, JT
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (03): : 1271 - 1274
[5] PLASMON COUPLING TO CORE HOLES IN SIMPLE METALS
BRADSHAW, AM
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[J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1975, 7 (01) : 45 - 53
[6] PLASMON COUPLING TO CORE HOLE EXCITATIONS IN CARBON
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CEDERBAUM, LS
DOMCKE, W
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[J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1974, 7 (24): : 4503 - 4512
[7] INTRINSIC AND EXTRINSIC PLASMON COUPLING IN X-RAY PHOTOEMISSION FROM CORE STATES OF ADSORBED ATOMS
BRADSHAW, AM
DOMCKE, W
CEDERBAUM, LS
[J]. PHYSICAL REVIEW B, 1977, 16 (04): : 1480 - 1488
[8] A MATHEMATICAL-MODEL OF THE COUPLED FLUID-MECHANICS AND CHEMICAL-KINETICS IN A CHEMICAL VAPOR-DEPOSITION REACTOR
COLTRIN, ME
KEE, RJ
MILLER, JA
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) : 425 - 434
[9] EVALUATION OF XPS-DATA OF OXIDE LAYERS
EBEL, MF
LIEBL, W
[J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1979, 16 (06) : 463 - 470
[10] ELECTRON MEAN ESCAPE DEPTHS FROM X-RAY PHOTOELECTRON-SPECTRA OF THERMALLY OXIDIZED SILICON DIOXIDE FILMS ON SILICON
FLITSCH, R
RAIDER, SI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 305 - 308

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