PREPARATION AND PROPERTIES OF SPUTTERED GLASSY CARBON-FILMS

被引:19
作者
MARINKOVIC, Z [1 ]
ROY, R [1 ]
机构
[1] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802
关键词
D O I
10.1016/0008-6223(76)90005-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:329 / 331
页数:3
相关论文
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