EXTRACTION PERFORMANCE OF DUAL-GRID ION OPTICS - SIMULATION AND EXPERIMENT

被引:10
作者
KORZEC, D
SCHMITZ, K
ENGEMANN, J
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期
关键词
D O I
10.1116/1.584129
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:2095 / 2099
页数:5
相关论文
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