ATOMIC FORCE MICROSCOPY USING ZNO WHISKER TIP

被引:39
作者
KADO, H
YOKOYAMA, K
TOHDA, T
机构
[1] Central Research Laboratories, Matsushita Electric Industrial Co., Ltd., Osaka 570, Moriguchi
关键词
D O I
10.1063/1.1142548
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have developed an atomic force microscope (AFM) using a zinc oxide (ZnO) whisker crystal as a probing tip. The ZnO whisker crystal is tetrapodal in shape, with each leg having a length of 5-30-mu-m, a radius of curvature less than 10 nm, and a cone half angle of 1-degrees-2-degrees. Polyimide thin films rubbed with cloths as liquid-crystal aligning films were employed for AFM imaging. Due to the needle shape of the probing tip, the AFM was able to resolve the tiny grooves (3-5 nm deep, 60-80 nm apart) on these films more clearly than that using a conventional pyramidal tip. The new AFM will be available for precise evaluation of surfaces on which fine structures are microfabricated in nanometer scale.
引用
收藏
页码:3330 / 3332
页数:3
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