PHOTOEMISSION PROFILES IN PARALLEL-PLATE RF DISCHARGE IN SF6 GAS

被引：6

作者：

ISHIKAWA, I

AMAMIYA, T

SUGANOMATA, S

机构：

[1] Yamanashi University, Kofu

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 12A期

关键词：

RF DISCHARGE; SF6; GAS; N2 AS A PROBE GAS; N2 2ND POSITIVE BAND; N2+ 1ST NEGATIVE BAND; SPATIOTEMPORAL PROFILE OF PHOTOEMISSION; DISCHARGE STRUCTURE; SPACE CHARGE EFFECT;

D O I：

10.1143/JJAP.31.4037

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A small amount of N2 gas was added to SF6 as a probe gas in SF6 discharge. Spatiotemporal emission profiles at the N2 337.1-nm line in 1 MHz discharge at pressures of around 0.3 Torr show a moving luminous peak from the negative glow region toward the electrode, whose polarity changes from negative to positive in each cycle of an applied voltage. The emission at the N2+ 391.4-nm line, on the other hand, does not show such a profile. The moving luminous peak is considered to reveal a contracting part of the cathode sheath.

引用

页码：4037 / 4039

页数：3

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