PHOTOOXIDATION OF SILICON MONOXIDE TO SILICON DIOXIDE WITH PULSED FAR ULTRAVIOLET (193 NM) LASER-RADIATION

被引：15

作者：

BLUM, SE

BROWN, KH

SRINIVASAN, R

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 11期

关键词：

D O I：

10.1063/1.94216

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1026 / 1027

页数：2

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