ARSENIC BOMBARDMENT OF PMMA AND MICROPOSIT 23M

被引：6

作者：

CHERECKDJIAN, S

WILSON, IH

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1986年 / 98卷 / 1-4期

关键词：

D O I：

10.1080/00337578608206110

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：179 / 187

页数：9

共 16 条

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :158-165

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[9] DRY DEVELOPMENT OF RESISTS EXPOSED TO LOW-ENERGY FOCUSED GALLIUM ION-BEAM [J].

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JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) :1149-1154

[10]

Muray J. J., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1545

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