THIN PERIODIC STRUCTURES IN PHOTORESIST - FABRICATION AND EXPERIMENTAL EVALUATION

被引:15
作者
AUSTIN, S [1 ]
STONE, FT [1 ]
机构
[1] POLYTECH INST NEW YORK,BROOKLYN,NY
来源
APPLIED OPTICS | 1976年 / 15卷 / 09期
关键词
D O I
10.1364/AO.15.002126
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:2126 / 2130
页数:5
相关论文
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