STUDIES OF TEMPERATURE AND FLUX DEPENDENCES OF SPUTTERING YIELD OF NICKEL FROM 2-LAYERED FILMS OF NI-NI3C

被引：17

作者：

MORITA, K

OHNO, H

HAYASHIBARA, M

ITOH, N

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 2卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(84)90273-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：596 / 600

页数：5

共 19 条

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[2]

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[9] CHANGES IN GOLD CONCENTRATION AT THE SURFACE OF A AU-CU ALLOY SPUTTERED AT LOW-TEMPERATURE [J].

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[10] SUPPRESSION OF SPUTTERING OF NICKEL BY COVERAGE WITH SELF-SUSTAINING THIN SEGREGATED CARBON LAYERS [J].

MORITA, K ;

TSUCHIYA, T ;

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ITOH, N .

JOURNAL OF NUCLEAR MATERIALS, 1983, 116 (01) :63-68

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