GROWTH OF EPITAXIAL FE ON GAAS BY METALORGANIC CVD

被引:18
作者
KAPLAN, R
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.571952
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:551 / 553
页数:3
相关论文
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