MECHANICAL DEFLECTION OF CANTILEVER MICROBEAMS - A NEW TECHNIQUE FOR TESTING THE MECHANICAL-PROPERTIES OF THIN-FILMS

被引：274

作者：

WEIHS, TP

HONG, S

BRAVMAN, JC

NIX, WD

机构：

来源：

关键词：

D O I：

10.1557/JMR.1988.0931

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：931 / 942

页数：12

共 20 条

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