PHYSICAL LIMITS TO VLSI TECHNOLOGY USING SILICON MOSFETS

被引:5
作者
DENNARD, RH
机构
来源
PHYSICA B & C | 1983年 / 117卷 / MAR期
关键词
D O I
10.1016/0378-4363(83)90436-9
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:39 / 43
页数:5
相关论文
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