STUDIES OF ATOMIC AND MOLECULAR FLUORINE REACTIONS ON SILICON SURFACES

被引：72

作者：

STINESPRING, CD

FREEDMAN, A

机构：

来源：

APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 11期

关键词：

D O I：

10.1063/1.96700

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：718 / 720

页数：3

共 13 条

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