REACTION OF ATOMIC FLUORINE WITH SILICON

被引：81

作者：

NINOMIYA, K

SUZUKI, K

NISHIMATSU, S

OKADA, O

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 03期

关键词：

D O I：

10.1063/1.336133

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：1177 / 1182

页数：6

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