OPTIMUM GROWTH TEMPERATURE DETERMINATION FOR GALNSB/INAS STRAINED-LAYER SUPERLATTICES

被引:7
作者
DAVIS, JL
WAGNER, RJ
WATERMAN, JR
SHANABROOK, BV
OMAGGIO, JP
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 03期
关键词
D O I
10.1116/1.586766
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To determine the optimum growth temperature for GaInSb/InAs strained layer superlattices (SLS) a series of SLS was grown over the temperature range 357-433-degrees-C. Temperatures were estimated by determining the absorption spectrum of the GaAs substrate, hence its band gap, and thus its temperature. SLS were evaluated by single crystal x-ray diffraction and interband magnetoabsorption (IMA) measurements. X-ray spectra showed as many as eight peaks due to the superlattice. The quality of the superlattices as indicated by the x-ray data had a well defined maximum between 390 and 410-degrees-C. IMA measurements indicated band gaps from 85 to 154 meV.
引用
收藏
页码:861 / 863
页数:3
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