CARBON IN SILICON - PROPERTIES AND IMPACT ON DEVICES

被引：114

作者：

KOLBESEN, BO ^{[1
]}

MUHLBAUER, A ^{[1
]}

机构：

[1] SIEMENS AG,UNTERNEHMENSBEREICH BAUELEMENTE,SILIZIUMMAT ENTWICKLUNG,D-8000 MUNCHEN 46,FED REP GER

来源：

关键词：

D O I：

10.1016/0038-1101(82)90206-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：759 / 775

页数：17

共 56 条

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[J]. JOURNAL OF CHEMICAL PHYSICS, 1953, 21 (11) : 1987 - 1991
[8] BURTSCHER J, 1974, SCI PRINCIPLES SEMIC, P36
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