DIMES-01, A BASE-LINE BIFET PROCESS FOR SMART SENSOR EXPERIMENTATION

被引：27

作者：

NANVER, LK

GOUDENA, EJG

VANZEIJL, HW

机构：

[1] Delft Institute of Microelectronics and Submicrontechnology, DIMES IC Process Research Sector, Delft University of Technology, Delft

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 36卷 / 02期

关键词：

D O I：

10.1016/0924-4247(93)85008-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The DIMES-01 BIFET baseline process is presented. The process and devices are described in relationship to their application in integrated silicon sensor research and development. In particular, the possibilities of introducing special sensor process modules and steps are treated.

引用

页码：139 / 147

页数：9

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