LIMITS OF TOPOGRAPHIC MEASUREMENT BY THE SCANNING TUNNELLING AND ATOMIC FORCE MICROSCOPES

被引：28

作者：

STEDMAN, M ^{[1
]}

机构：

[1] NATL PHYS LAB,DIV MECH & OPT METROL,TEDDINGTON TW11 0LW,MIDDX,ENGLAND

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1988年 / 152卷

关键词：

D O I：

10.1111/j.1365-2818.1988.tb01428.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：611 / 618

页数：8

共 8 条

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[5]

Stedman M., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V803, P138, DOI 10.1117/12.941285

STEDMAN, M .

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1987, 9 (03) :149-152

[7]

TSUDA N, 1988, IN PRESS JAP J PRECI

[8] TOPOGRAFINER - INSTRUMENT FOR MEASURING SURFACE MICROTOPOGRAPHY [J].

YOUNG, R ;

WARD, J ;

SCIRE, F .